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Journal of Non-Crystalline Solids

Volumn 266-269 A, Issue , 2000, Pages 43-47

Evolutionary phase diagrams for the deposition of silicon films from hydrogen-diluted silane

(6) Koh, Joohyun a Ferlauto, A S a Rovira, P I a Koval, R J a Wronski, C R a Collins, R W a

a PENNSYLVANIA STATE UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003157439 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/s0022-3093(99)00716-4 Document Type: Article

Times cited : (22)

References (17)

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