Nano-texturing of surfaces by constricting epitaxial growth of molecules

CIRP Annals - Manufacturing Technology

Volumn 51, Issue 1, 2002, Pages 323-326

  Kakuta, A ^a   Moronuki, N ^a   Furukawa, Y ^a  

^a TOKYO METROPOLITAN UNIVERSITY   (Japan)

Author keywords

Nano texture; Physical vapor deposition (PVD); Single crystal silicon

Indexed keywords

MOLECULAR BEAM EPITAXY; PHYSICAL VAPOR DEPOSITION; SILICON; SINGLE CRYSTALS;

NANO-TEXTURES;

TEXTURES;

EID: 0037501244     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)61527-3     Document Type: Review

References (9)

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