Two-dimensional dopant profiling by scanning capacitance force microscopy

Applied Surface Science

Volumn 210, Issue 1-2 SPEC., 2003, Pages 93-98

  Kimura, K ^a   Kobayashi, K ^a   Yamada, H ^a   Matsushige, K ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Angular frequency; Frequency modulation; Lock in amplifier; Scanning capacitance force microscopy

Indexed keywords

ATOMIC FORCE MICROSCOPY; CAPACITANCE; ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTROSTATICS; FREQUENCY MODULATION; OSCILLATIONS; SCANNING; SEMICONDUCTOR JUNCTIONS;

SCANNING CAPACITANCE FORCE MICROSCOPY;

SEMICONDUCTOR DOPING;

EID: 0037474580     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)01486-1     Document Type: Conference Paper

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