MEMS fabrication perspectives from the MIT Microengine Project

Surface and Coatings Technology

Volumn 163-164, Issue , 2003, Pages 273-280

  Khanna, Ravi ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Deep reactive ion etching; MEMS; Silicon; Water bonding

Indexed keywords

COMBUSTION; ELECTRIC POWER GENERATION; ELECTRIC POWER SYSTEMS; MICROELECTROMECHANICAL DEVICES; TURBOMACHINERY;

LARGE-SCALE HIGH POWER-DENSITY POWER SOURCES;

JET ENGINES;

FABRICATION; MICROELECTROMECHANICAL SYSTEM; SILICON; TURBOMACHINERY;

EID: 0037472667     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00637-0     Document Type: Article

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