Thermodynamic equilibrium calculation of Cu(s)-Cl 2 (g) reaction

Applied Surface Science

Volumn 207, Issue 1-4, 2003, Pages 158-168

  Kwon, Myoung Seok ^a   Lee, Jeong Yong ^b  

^a University of Seoul   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Chlorine; Cu; Equilibrium; Phase; Reaction

Indexed keywords

CHLORINE; COPPER; FREE ENERGY; PHASE EQUILIBRIA; THIN FILMS;

THERMODYNAMIC EQUILIBRIUM;

PLASMA ETCHING;

EID: 0037470434     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)01330-2     Document Type: Article

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