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Volumn 167, Issue 2-3, 2003, Pages 288-291
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Effects of oxygen and nitrogen on carbon nanotube growth using a microwave plasma chemical vapor deposition technique
a a a a a a a a |
Author keywords
Carbon nanotubes; Microwave plasma enhanced chemical vapor deposition (MPECVD); Nitrogen; Oxygen
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Indexed keywords
CATALYSTS;
COMPOSITION;
GRAIN SIZE AND SHAPE;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SYNTHESIS (CHEMICAL);
CATALYST GRAINS;
CARBON NANOTUBES;
CARBON;
CHEMICAL VAPOR DEPOSITION;
COATING;
NITROGEN;
OXYGEN;
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EID: 0037461189
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(02)00921-0 Document Type: Article |
Times cited : (20)
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References (11)
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