Variable temperature STM studies of the adsorption of oxygen on the Si(1 1 1)- 7 × 7 surface

Surface Science

Volumn 528, Issue 1-3, 2003, Pages 132-137

  Mayne, Andrew J ^a   Rose, Franck ^a   Comtet, Geneviève ^a   Hellner, Lucette ^a   Dujardin, Gérald ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

Adsorption kinetics; Oxidation; Scanning tunneling microscopy; Semiconducting surfaces; Silicon

Indexed keywords

OXIDATION; OXYGEN; SCANNING TUNNELING MICROSCOPY; SILICON; THERMAL EFFECTS;

PRECURSORS;

GAS ADSORPTION;

EID: 0037457361     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(02)02622-5     Document Type: Conference Paper

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