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Volumn 80, Issue 1-3, 2001, Pages 54-59

Thermal decomposition of InP surfaces: Volatile component loss, morphological changes, and pattern formation

Author keywords

InP; Pattern formation; Thermal decomposition

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; EPITAXIAL GROWTH; ETCHING; EVAPORATION; FRACTALS; MASS SPECTROMETRY; MORPHOLOGY; PYROLYSIS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR GROWTH;

EID: 0035932230     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(00)00588-2     Document Type: Article
Times cited : (14)

References (10)
  • 9
    • 85166144491 scopus 로고    scopus 로고
    • A long-range waviness was detected by Makyoh topography, probably caused by the 'bubble effect' during chemical etching prior to epitaxial growth


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.