An integrated piezo-acoustic shear-force distance sensor with nanometer resolution for a micropipette tool

Sensors and Actuators, A: Physical

Volumn 103, Issue 3, 2003, Pages 353-358

  Haefliger, Daniel ^a   Muenchinger, Marc ^a   Schitter, Georg ^a   Stemmer, Andreas ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Micro fabrication; Micropipette; Particle handling; Pick and place; Shear force distance control

Indexed keywords

ALUMINUM; DAMPING; NANOSTRUCTURED MATERIALS; OSCILLATIONS; PIEZOELECTRICITY; RESONANCE; VIBRATIONS (MECHANICAL);

SHEAR-FORCE DISTANCE SENSORS;

SENSORS;

EID: 0037442869     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00406-5     Document Type: Article

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