Enhancement of cluster yield under gold dimer oblique bombardment of the silicon surface

Applied Surface Science

Volumn 203-204, Issue , 2003, Pages 148-151

  Medvedeva, M ^a   Wojciechowski, I ^a   Garrison, B J ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Energy dissipation; Silicon; SIMS; Sputtering

Indexed keywords

COMPUTER SIMULATION; DIMERS; ENERGY DISSIPATION; GOLD; ION BOMBARDMENT; PROBABILITY; SPUTTERING; SUBSTRATES;

SILICON BOMBARDMENT;

SILICON;

EID: 0037438078     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00719-5     Document Type: Conference Paper

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