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Volumn 19, Issue 1-4, 1998, Pages 1-10
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Heteroepitaxial growth of LiTaO3 thin films by pyrosol process
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Author keywords
Chemical vapour deposition; Deposition process; LiTaO3 thin films; Pyrolysis; X ray diffraction
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
CRYSTAL ORIENTATION;
CRYSTALLINE MATERIALS;
EPITAXIAL GROWTH;
FILM GROWTH;
LITHIUM COMPOUNDS;
PYROLYSIS;
SAPPHIRE;
SUBSTRATES;
X RAY DIFFRACTION ANALYSIS;
LITHIUM TITANATE;
PYROSOL PROCESS;
X RAY POLE FIGURES;
DIELECTRIC FILMS;
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EID: 0032298477
PISSN: 10584587
EISSN: None
Source Type: Journal
DOI: 10.1080/10584589808012692 Document Type: Article |
Times cited : (6)
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References (11)
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