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Volumn 109-110, Issue , 1997, Pages 520-523
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Low biased voltage induced textured growth of LiNbO 3 films on silicon wafer
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS SILICON;
DIELECTRIC FILMS;
ELECTRIC FIELD EFFECTS;
FERROELECTRIC MATERIALS;
LITHIUM COMPOUNDS;
MICROSTRUCTURE;
NUCLEATION;
SCANNING ELECTRON MICROSCOPY;
SILICA;
SILICON WAFERS;
X RAY DIFFRACTION ANALYSIS;
X RAY PHOTOELECTRON SPECTROSCOPY;
PULSED LASER DEPOSITION;
FILM GROWTH;
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EID: 0031077943
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(96)00628-9 Document Type: Article |
Times cited : (14)
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References (6)
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