Silicon oxide gas barrier films deposited by reactive sputtering

Surface and Coatings Technology

Volumn 166, Issue 1, 2003, Pages 24-30

  Iwamori, Satoru ^a   Gotoh, Yumi ^a   Moorthi, Kryzysztof ^a  

^a MITSUI CHEMICALS INC   (Japan)

Author keywords

Oxygen; Polyester; Reactive sputtering; Silicon oxide; Transmission electron micrograph

Indexed keywords

ANNEALING; MIXTURES; SILICA; SPUTTER DEPOSITION; SPUTTERING;

REACTIVE SPUTTERING;

THIN FILMS;

FILM;

EID: 0037416667     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00769-7     Document Type: Article

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