A study of defects in ultra-thin transparent coatings on polymers

Surface and Coatings Technology

Volumn 116-119, Issue , 1999, Pages 1204-1210

  Da Silva Sobrinho, A S ^a   Czeremuszkin, G ^b   Latreche M ^b   Dennler, G ^a   Wertheimer, M R ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^b INSTITUTE FOR RESEARCH IN IMMUNOLOGY AND CANCER   (Canada)

Author keywords

Barrier coatings; Defects; Microscopies; PECVD; Permeation; Silicon compounds

Indexed keywords

CERAMIC COATINGS; DEFECTS; MECHANICAL PERMEABILITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA ETCHING; PLASTIC PRODUCTS; REACTIVE ION ETCHING; SILICA; SILICON NITRIDE; TRANSPARENCY; ULTRATHIN FILMS;

GAS BARRIER COATINGS;

PROTECTIVE COATINGS;

BARRIER; CERAMIC COATING; DEFECT; POLYMER;

EID: 0033373184     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00152-8     Document Type: Conference Paper

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