Structural and optical properties of BST thin films prepared by the sol-gel process

Microelectronic Engineering

Volumn 66, Issue 1-4, 2003, Pages 860-864

  Zhang, Tianjin ^a   Gu, Haoshuang ^a   Liu, Jianghua ^a  

^a HUBEI UNIVERSITY   (China)

Author keywords

BST thin films; Microstructure; Optical properties; Sol gel process

Indexed keywords

ANNEALING; BARIUM COMPOUNDS; CRYSTALLIZATION; OPTICAL PROPERTIES; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; SOL-GELS; STRUCTURE (COMPOSITION); X RAY DIFFRACTION ANALYSIS;

POST-DEPOSITION ANNEALING;

THIN FILMS;

EID: 0037394841     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)01012-2     Document Type: Conference Paper

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