Interaction of keV ions with insulator films at grazing incidence: Growth characterization and electron emission

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 203, Issue , 2003, Pages 41-48

  Sanchez E A ^a   Otero, G ^a   Tognalli, N ^a   Grizzi, O ^a   Ponce, V H ^a  

^a CENTRO ATÓMICO BARILOCHE   (Argentina)

Author keywords

Al; AlF3; Electron emission; Ion surface interaction; Thin insulting film

Indexed keywords

ADSORPTION; ALUMINUM COMPOUNDS; ELECTRIC INSULATORS; ELECTRON EMISSION; ELECTRON TRANSPORT PROPERTIES; EVAPORATION; FILM GROWTH; ION BOMBARDMENT; POLARIZATION; PROTONS; SCATTERING; STOICHIOMETRY; SURFACE REACTIONS;

INSULATOR FILMS;

THIN FILMS;

EID: 0037390732     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)02172-9     Document Type: Article

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