Er emission from Er-doped Si-rich silicon oxide layers synthesised by hydrogen reactive magnetron co-sputtering

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 16, Issue 3-4, 2003, Pages 341-346

  Gourbilleau, F ^a   Choppinet, P ^a   Dufour, C ^a   Levalois, M ^a   Madelon, R ^a   Sada, C ^b   Battaglin, G ^c   Rizk, R ^a  

^a LERMAT Laboratoire d'Etude et de Recherche sur les Materiaux   (France)

^b UNIVERSITY OF PADOVA   (Italy)

^c INFM   (Italy)

Author keywords

Erbium; Nanograin; Photoluminescence; Silicon; Sputtering

Indexed keywords

DOPING (ADDITIVES); ERBIUM; HYDROGEN; LIGHT AMPLIFIERS; LIGHT EMISSION; MAGNETRON SPUTTERING; PARTIAL PRESSURE; PHOTOLUMINESCENCE; SYNTHESIS (CHEMICAL);

PLASMA GAS;

SILICA;

EID: 0037373473     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1386-9477(02)00688-4     Document Type: Conference Paper

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