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Volumn 96, Issue 2-4, 2002, Pages 195-200
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A novel method to achieve 1.54 μm light emission from silica thin films
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Author keywords
Erbium; Ion implantation; Photoluminescence; Si nanocrystal; Silicon oxide
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Indexed keywords
ERBIUM;
FILM GROWTH;
INTERFACES (MATERIALS);
ION IMPLANTATION;
ION SOURCES;
NANOSTRUCTURED MATERIALS;
PHOTOLUMINESCENCE;
RAPID THERMAL ANNEALING;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SILICA;
X RAY PHOTOELECTRON SPECTROSCOPY;
EXCITATION ENERGY;
THIN FILMS;
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EID: 0036495284
PISSN: 00222313
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-2313(01)00239-3 Document Type: Article |
Times cited : (4)
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References (13)
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