Viscoelastic stress relaxation in film/substrate systems - Kelvin model

Journal of Applied Physics

Volumn 93, Issue 5, 2003, Pages 2453-2457

  Ko, Sun Chien ^a   Lee, Sanboh ^a   Hsueh, Chun Hway ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; LAPLACE TRANSFORMS; SEMICONDUCTING FILMS; VISCOELASTICITY;

ELASTIC FILMS;

STRESS RELAXATION;

EID: 0037348070     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1541108     Document Type: Article

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