Creep curve of silicon wafers

Applied Physics Letters

Volumn 30, Issue 11, 1977, Pages 564-566

  Isomae, S ^a   Nanba, M ^a   Tamaki, Y ^a   Maki, M ^a  

^a HITACHI LTD   (Japan)

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EID: 36749107787     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.89261     Document Type: Article

References (9)

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