Evaluation of contaminants in cleanroom atmosphere and on silicon wafer surface (II) organic compounds contaminants

Conference Proceedings - Annual Semiconductor Pure Water and Chemicals Conference

Volumn 2, Issue , 1997, Pages 157-166

  Fujimoto, T ^a   Takeda, K ^a   Nonaka, T ^a   Taira, T ^a   Sado, M ^a  

^a Sumika Chemicals Analysis Service Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AIR POLLUTION CONTROL; CHEMICAL ANALYSIS; CHROMATOGRAPHIC ANALYSIS; MASS SPECTROMETRY; ORGANIC COMPOUNDS; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

ORGANIC CONTAMINANTS;

CLEAN ROOMS;

EID: 0030677438     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)