MOVPE growth of ZnO using various oxygen precursors

Journal of Crystal Growth

Volumn 248, Issue SUPPL., 2003, Pages 20-24

  Kirchner, Christoph ^a   Gruber, Th ^a   Reuss F ^a   Thonke, K ^a   Waag, A ^a   Giessen Ch ^b   Heuken, M ^b  

^a UNIVERSITY OF ULM   (Germany)

^b AIXTRON AG   (Germany)

Author keywords

A3. Metalorganic vapor phase epitaxy; B1. Oxides; B2. Semiconducting II VI materials

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; BINDING ENERGY; CHEMICAL SENSORS; DOPING (ADDITIVES); OPTOELECTRONIC DEVICES; OXYGEN; ULTRAVIOLET RADIATION; ZINC OXIDE;

OXYGEN PRECURSORS;

METALLORGANIC VAPOR PHASE EPITAXY;

EID: 0037292492     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(02)01866-3     Document Type: Conference Paper

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