Dependence of thermal conductivity of porous silicon on porosity characterized by photoacoustic technique

Review of Scientific Instruments

Volumn 74, Issue 1 II, 2003, Pages 601-603

  Shen, Qing ^a   Toyoda, Taro ^a  

^a UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; POROSITY; POROUS SILICON; SUBSTRATES; THERMAL CONDUCTIVITY OF SOLIDS; THERMAL DIFFUSION IN SOLIDS;

TRANSMISSION DETECTION CONFIGURATION (TDC);

PHOTOACOUSTIC EFFECT;

EID: 0037280555     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1515897     Document Type: Conference Paper

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