High spatial resolution Makyoh topography using shifted grid illumination

Physica Status Solidi (A) Applied Research

Volumn 195, Issue 1 SPEC, 2003, Pages 271-276

  Lukács, István E ^a   Riesz, Ferenc ^a   Laczik, Zsolt J ^b  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b UNIVERSITY OF OXFORD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGE ANALYSIS; INTERFEROMETRY; LIGHTING; OPTICAL RESOLVING POWER; SEMICONDUCTOR MATERIALS;

MAKYOH TOPOGRAPHY;

MIRRORS;

EID: 0037278066     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.200306271     Document Type: Conference Paper

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