SCOPUS 정보 검색 플랫폼

Optical Engineering

Volumn 39, Issue 9, 2000, Pages 2562-2567

Quantitative Makyoh topography

(1) Laczik, Zsolt John a

a UNIVERSITY OF OXFORD (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; FOURIER TRANSFORMS; HOUGH TRANSFORMS; IMAGE QUALITY; LASER BEAMS; MIRRORS; NEODYMIUM LASERS; OPTICAL COLLIMATORS; OPTICAL FILTERS; POLISHING; REFLECTION; SEMICONDUCTING INDIUM PHOSPHIDE;

MAGIC MIRROR IMAGE; MAKYOH TOPOGRAPHY;

REFLECTOMETERS;

EID: 0034264777 PISSN: 00913286 EISSN: None Source Type: Journal
DOI: 10.1117/1.1287934 Document Type: Article

Times cited : (19)

References (9)

1
- 0025439729
- Characterization of mirror-like wafer surfaces using the magic mirror technique
- S. Hahn, K. Kugimiya, M. Yamashita, P. R. Blaustein, and K. Takahashi, "Characterization of mirror-like wafer surfaces using the magic mirror technique," J. Cryst. Growth 103, 423-432 (1990).
- (1990) J. Cryst. Growth , vol.103 , pp. 423-432
- Hahn, S.¹ Kugimiya, K.² Yamashita, M.³ Blaustein, P.R.⁴ Takahashi, K.⁵

2
- 0029357313
- Comparison of surface polishing techniques used for InP wafers
- Z. Laczik, G. R. Booker, and A. Mowbray, "Comparison of surface polishing techniques used for InP wafers," J. Cryst. Growth 153, 1-5 (1995).
- (1995) J. Cryst. Growth , vol.153 , pp. 1-5
- Laczik, Z.¹ Booker, G.R.² Mowbray, A.³

3
- 3242695641
- Characterization of microdeformation and crystal defects in silicon wafer surfaces
- K. Kugiyama, "Characterization of microdeformation and crystal defects in silicon wafer surfaces," J. Electrochem. Soc. 130, 2123-2125 (1983).
- (1983) J. Electrochem. Soc. , vol.130 , pp. 2123-2125
- Kugiyama, K.¹

4
- 0025438145
- Characterization of polished surfaces by 'Makyoh'
- K. Kugiyama, "Characterization of polished surfaces by 'Makyoh,'" J. Cryst. Growth 103, 461-468 (1990).
- (1990) J. Cryst. Growth , vol.103 , pp. 461-468
- Kugiyama, K.¹

5
- 0025442735
- Evaluation of directly bonded silicon wafer interface by the magic mirror technique
- O. Okabayashi, H. Shirotori, M. Sakurazawa, E. Kanda, T. Yokoyama, and M. Kawashima, "Evaluation of directly bonded silicon wafer interface by the magic mirror technique," J. Cryst. Growth 103, 456-460 (1990).
- (1990) J. Cryst. Growth , vol.103 , pp. 456-460
- Okabayashi, O.¹ Shirotori, H.² Sakurazawa, M.³ Kanda, E.⁴ Yokoyama, T.⁵ Kawashima, M.⁶

6
- 0032658548
- Quantitative Makyoh Topography
- In-Line Characterization, Yield Reliability, and Failure Analyses in Microelectronic Manufacturing, K. Amberiadis, G. Kissinger, K. Okumura, S. Pabbisetty, and L. H. Weiland, Eds.
- Z. J. Laczik, "Quantitative Makyoh Topography," in In-Line Characterization, Yield Reliability, and Failure Analyses in Microelectronic Manufacturing, K. Amberiadis, G. Kissinger, K. Okumura, S. Pabbisetty, and L. H. Weiland, Eds., Proc. SPIE 3743, 151-156 (1999).
- (1999) Proc. SPIE , vol.3743 , pp. 151-156
- Laczik, Z.J.¹

7
- 0025442152
- Characterization of mirror-polished silicon wafers by Makyoh method
- S. Tokura, N. Fujiuo, M. Ninomiya, and K. Masuda, "Characterization of mirror-polished silicon wafers by Makyoh method," J. Cryst. Growth 103, 437-442 (1990).
- (1990) J. Cryst. Growth , vol.103 , pp. 437-442
- Tokura, S.¹ Fujiuo, N.² Ninomiya, M.³ Masuda, K.⁴

8
- 0027544516
- Experimental and computer simulated Makyoh images of semiconductor wafers
- D. Korytar and M. Hrivnak, "Experimental and computer simulated Makyoh images of semiconductor wafers," Jpn. J. Appl. Phys., Part I 32, 693-698 (1993).
- (1993) Jpn. J. Appl. Phys., Part I , vol.32 , pp. 693-698
- Korytar, D.¹ Hrivnak, M.²

9
- 0015327061
- A practical algorithm for the determination of phase from image and diffraction plane pictures
- R. W. Gerchberg and W. O. Saxton, "A practical algorithm for the determination of phase from image and diffraction plane pictures," Optik (Stuttgart) 35, 237-246 (1972).
- (1972) Optik (Stuttgart) , vol.35 , pp. 237-246
- Gerchberg, R.W.¹ Saxton, W.O.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.