Possibilities of quantitative Makyoh topography

ASDAM 2000 - Conference Proceedings: 3rd International EuroConference on Advanced Semiconductor Devices and Microsystems

Volumn , Issue , 2000, Pages 215-218

  Riesz, Ferenc ^a   Lukács, István E ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ITERATIVE METHODS; MICROSYSTEMS; SURFACE RECONSTRUCTION; SURFACE TOPOGRAPHY;

ITERATIVE ALGORITHM; MAKYOH TOPOGRAPHIES; NUMERICAL ALGORITHMS; STRUCTURED ILLUMINATION;

SEMICONDUCTOR DEVICES;

EID: 10044224048     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ASDAM.2000.889483     Document Type: Conference Paper

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