Makyoh topography for the morphological study of compound semiconductor wafers and structures

Materials Science and Engineering: B

Volumn 80, Issue 1-3, 2001, Pages 220-223

  Riesz, Ferenc ^a  

^a INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

Author keywords

Compound semiconductors; Curvature measurement; Makyoh topography; Surface flatness

Indexed keywords

MATHEMATICAL MODELS; MOLECULAR BEAM EPITAXY; MORPHOLOGY; SEMICONDUCTING FILMS; SUBSTRATES;

MAKYOH TOPOGRAPHY;

SEMICONDUCTOR DEVICE STRUCTURES;

EID: 0035932278     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(00)00606-1     Document Type: Article

References (12)