High-resolution complex structures for two-dimensional photonic crystals realized by x-ray diffraction lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 2, 2003, Pages 748-753

  Businaro, L ^a   Romanato, F ^a   Candeloro, P ^a   Di Fabrizio, E ^a   Patrini, M ^b   Galli, M ^b   Andreani, C ^b   Passaseo, A ^c   De Vittorio, M ^c  

^a INFM   (Italy)

^b UNIVERSITY OF PAVIA   (Italy)

^c NATIONAL NANOTECHNOLOGY LABORATORY   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CRYSTALS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OPTICAL WAVEGUIDES; PHOTONS; REACTIVE ION ETCHING; SEMICONDUCTING GALLIUM ARSENIDE; X RAY DIFFRACTION ANALYSIS; X RAY LITHOGRAPHY;

PHOTONIC BAND GAP (PBG);

BAND STRUCTURE;

EID: 0037273929     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1547726     Document Type: Article

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