X-ray "magnifying" imaging investigation of giant Burgers vector micropipe-dislocations in 4H-SiC

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 200, Issue , 2003, Pages 323-328

  Hartwig J ^a   Baruchel, J ^a   Kuhn, H ^b   Huang, X R ^c   Dudley, M ^c   Pernot, E ^d  

^a EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^b INFINEON TECHNOLOGIES AG   (Germany)

^c STONY BROOK UNIVERSITY   (United States)

^d Grenoble INP Phelma   (France)

Author keywords

Silicon carbide

Indexed keywords

COMPUTER SIMULATION; DISLOCATIONS (CRYSTALS); IMAGING TECHNIQUES; SURFACE TOPOGRAPHY; SYNCHROTRON RADIATION; X RAY DIFFRACTION ANALYSIS;

X-RAY BRAGG DIFFRACTION IMAGING;

SILICON CARBIDE;

EID: 0037241383     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)01695-6     Document Type: Conference Paper

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