Effects of the interface and surface nanostructures on field emission of amorphous diamond film

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 1 SPEC., 2003, Pages 581-586

  Chen, Jian ^a   Xu, N S ^a   Deng, S Z ^a   She, J C ^a   Chen, Jun ^a  

^a SUN YAT SEN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; AMORPHOUS FILMS; ELECTRON EMISSION; ETCHING; INTERFACES (MATERIALS); NANOSTRUCTURED MATERIALS; SILICON; SUBSTRATES; TITANIUM;

AMORPHOUS DIAMOND FILM; CHEMICAL ETCHING; FIELD ELECTRON EMISSION; SURFACE NANOSTRUCTURES;

DIAMOND FILMS;

EID: 0037207774     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1527637     Document Type: Article

References (17)

1. P. Lerner, N. M. Miskovsky, and P. H. Cutler, J. Vac. Sci. Technol. B 16, 900 (1998).
2. J. C. She, S. E. Huq, S. Z. Deng, J. Chen, and N. S. Xu, J. Vac. Sci. Technol. B 19, 1059 (2001).
3. J. S. Lee, K. S. Liu, and I. N. Lin, J. Appl. Phys. 82, 3310 (1997).
4. J. Y. Luo, K. S. Liu, J. S. Lee, I. N. Lin, and H. F. Cheng, Diamond Relat. Mater. 7, 704 (1998).
5. M. W. Geis, J. W. Twichell, and T. M. Lyszczarz, J. Vac. Sci. Technol. B 14, 2060 (1996).
6. P. Lerner, P. H. Cutler, and N. M. Miskovsky, J. Vac. Sci. Technol. B 15, 337 (1997).
7. P. Lerner, N. M. Miskovsky, and P. H. Cutler, J. Vac. Sci. Technol. B 16, 900 (1998).
8. K. Okano, S. Koizumi, S. R. P. Silva, and G. A. J. Amaratunga, Nature (London) 381, 140 (1996).
9. J. Chen, J. Chen, S. Z. Deng, J. C. She, and N. S. Xu, Ultramicroscopy 79, 89 (1999).
10. Y. J. Li, S. P. Lau, B. K. Tay, Z. Sun, J. R. Shi, X. Z. Ding, L. K. Cheah, and X. Shi, Diamond Relat. Mater. 10, 1515 (2001).
11. Y. Chen, Z. L. Wang, J. S. Yin, D. J. Johnson, and R. H. Prince, Chem. Phys. Lett. 22, 178 (1997).
12. F. J. Himpsel, J. A. Knapp, J. A. Van Vechten, and D. E. Eastman, Phys. Rev. B 20, 624 (1979).
13. N. S. Xu, Y. Tzeng, and R. V. Latham, J. Phys. D 26, 1776 (1993).
14. A. A. Talin, L. S. Pan, K. F. McCarty, T. E. Felter, H. J. Doerr, and R. F. Bunshah, Appl. Phys. Lett. 69, 3842 (1996).
15. A. V. Karabutov, V. D. Frolov, S. M. Pimenov, and V. I. Konov, Diamond Relat. Mater. 8, 763 (1999).
16. J. Chen, S. Z. Deng, N. S. Xu, K. H. Wu, and E. G. Wang, Appl. Phys. Lett. 75, 1323 (1999).
17. N. S. Xu, J. Chen, and S. Z. Deng, Appl. Phys. Lett. 76, 2463 (2000).