Low-field electron emission of Si microtip arrays produced by laser beam evaporation

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 1 SPEC., 2003, Pages 449-452

  Karabutov, A V ^a   Frolov, V D ^a   Simakin, A V ^a   Shafeev, G A ^a  

^a PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC FIELDS; EVAPORATION; LASER APPLICATIONS; MORPHOLOGY; SCANNING TUNNELING MICROSCOPY; SILICON WAFERS; SINGLE CRYSTALS; SUBSTRATES; SURFACE TOPOGRAPHY; X RAY DIFFRACTION ANALYSIS;

FIELD ELECTRON EMISSION; LASER BEAM EVAPORATION; SILICON MICROTIP ARRAYS;

ELECTRON EMISSION;

EID: 0037207752     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1541602     Document Type: Article

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