Atomic force microscopy of nickel dot arrays with tuning fork and nanotube probe

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 1 SPEC., 2003, Pages 323-325

  Rozhok, S ^a   Jung, S ^a   Chandrasekhar, V ^a   Lin, Xiwei ^b,c   Dravid, Vinayak P ^b  

^a NORTHWESTERN UNIVERSITY   (United States)

^b Northwestern University   (United States)

^c INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL MODIFICATION; ELECTRON BEAM LITHOGRAPHY; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; VAN DER WAALS FORCES;

MULTIWALLED CARBON NANOTUBE; NICKEL DOT ARRAYS; SCANNING FORCE MICROSCOPY;

CARBON NANOTUBES;

EID: 0037207724     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1539066     Document Type: Article

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