Influence of seed layers on microstructure and electrical properties of indium-tin oxide films

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 1 SPEC., 2003, Pages 288-292

  Han, Younggun ^a,b   Kim, Donghwan ^a   Cho, Jun Sik ^b   Koh, Seok Keun ^b  

^a Korea University   (South Korea)

^b P & I Corporation   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC PROPERTIES; ELECTRON MOBILITY; GRAIN SIZE AND SHAPE; INDIUM COMPOUNDS; ION BEAM ASSISTED DEPOSITION; MIXTURES; SPUTTER DEPOSITION;

INDIUM TIN OXIDE; ION BEAM SPUTTERING; SEED LAYER;

CONDUCTIVE FILMS;

EID: 0037207720     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1541571     Document Type: Article

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