Photoluminescence study of {311}defect-precursors in self-implanted silicon

Materials Science and Engineering: B

Volumn 91-92, Issue , 2002, Pages 43-45

  Tsuji, H ^a   Kim, R ^a   Hirose, T ^a   Shano, T ^a   Kamakura, Y ^a   Taniguchi, K ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Annealing; Clusters; Defect formation; Ion implantation

Indexed keywords

ANNEALING; CRYSTAL ATOMIC STRUCTURE; CRYSTAL DEFECTS; ION IMPLANTATION; NUMERICAL ANALYSIS; PHOTOLUMINESCENCE; THERMAL EFFECTS;

SILICON IMPLANTATION;

SEMICONDUCTING SILICON;

EID: 0037197522     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(01)00964-3     Document Type: Conference Paper

References (8)