Effect of implantation voltage on phase composition and surface roughness of α-Fe surface layer implanted by nitrogen ion

Applied Surface Science

Volumn 187, Issue 3-4, 2002, Pages 192-198

  Li, W L ^a   Sun, Y ^a   Fei, W D ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Implantation voltage; Phase composition; Plasma based ion implantation method; Surface roughness

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC POTENTIAL; ION IMPLANTATION; IRON; NITROGEN; PHASE COMPOSITION; X RAY DIFFRACTION;

PLASMA-BASED ION IMPLANTATION;

SURFACE ROUGHNESS;

EID: 0037186134     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00989-8     Document Type: Article

References (14)