Comparison of atomic force microscope and Rutherford backscattering spectrometry data of nanometre size zinc islands

Thin Solid Films

Volumn 290-291, Issue , 1996, Pages 312-316

  Tabet, M F ^a   Urban III, F K ^a  

^a The Department of Electrical and Computer Engineering   (United States)

Author keywords

Atomic force microscope; Deconvolution; Ionized cluster beam; RBS

Indexed keywords

ALGORITHMS; ATOMIC FORCE MICROSCOPY; DEPOSITION; NANOSTRUCTURED MATERIALS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; SUBSTRATES; ZINC;

DECONVOLUTION; IONIZED CLUSTER BEAM DEPOSITION; ZINC ISLANDS;

METALLIC FILMS;

EID: 13544251777     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)08968-7     Document Type: Article

References (19)

1. G. Benning, C.F. Quate and Ch. Gerber, Rev. Lett., 56 (9) (1986) 930.
2. P. Markiewicz and M.C. Goh, J. Vac. Sci. Technol B, 13 (3) (1995) 1115.
3. U. Schwartz, H. Haefke, P. Reimann and H. Gunthrodt, J. Microsc., 173 (1993) 183.
4. P. Markiewicz and M.C. Goh, Langmuir, 10 (1994) 5.
5. R. Chicon, M. Ortuno and J. Abellan, Surf. Sci., 181 (1987) 107.
6. P. Niedermann and O. Fischer, J. Microsc., 152 (1988) 93.
7. G. Reiss, F. Schneider, J. Vancea and H. Hoffmann, Appl. Phys. Lett., 57 (1990) 867.
8. P. Markiewicz and M.C. Goh, Rev. Sci. Instrum., 66 (5) (1995) 3186.
9. D. Keller and F. Franke, Surf. Sci., 268 (1992) 333.
10. D. Keller and F. Franke, Surf. Sci., 294 (1993) 409.
11. R. Miller, J. Vasenka and E. Henderson, Siam J. Appl. Math., 55 (5) (1995) 1362.
12. P. Godowski, V. Maurice and P. Marcus, Chem, Anal., 40 (1995) 231.
13. J. Vasenka, R. Miller and E. Henderson, Rev. Sci. Instrum., 65 (7) (1994) 2249.
14. L. Montelius and J. Tegenfeldt, Appl. Phys. Lett., 62 (21) (1993) 2628.
15. J.S. Villarrubia, Surf. Sci., 321 (1994) 287.
16. F.K. Urban III, S.W. Feng and J.J. Nainaparampil, Appl. Phys. Lett., 61 (10) (1992) 1180.
17. F.K. Urban III, S.W. Feng and J.J. Nainaparampil, J. Vac. Sci. Technol. B, 11 (5) (1993) 1916.
18. F.K. Urban III, S.W. Feng and J.J. Nainaparampil, J. Appl. Phys., 74 (2) (1993) 1335.
19. C.S. Lindquist and F.K. Urban III, Thin Solid Films, 270 (1/2) (1995) 399.