Surface modification without desorption: Recycling of Cl on Si(100)-(2 × 1)

Physical Review Letters

Volumn 88, Issue 12, 2002, Pages 1255081-1255084

  Nakayama, Koji S ^a   Graugnard, E ^a   Weaver, J H ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHLORINE; DESORPTION; DIMERS; GROWTH (MATERIALS); HIGH TEMPERATURE EFFECTS; RECYCLING; SILICON; SURFACE ROUGHNESS; SURFACE STRUCTURE;

TEMPERATURE PROGRAMMED DESORPTION (TPD);

ETCHING;

EID: 0037171170     PISSN: 00319007     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)