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Thin Solid Films

Volumn 409, Issue 1, 2002, Pages 43-45

Real time monitoring of layer growth on planetary reactor® by reflectance-anisotropy-spectroscopy

(6) Habets, N a Schmitt, T a Deufel, M a Lunenburger M a Heuken, M a Juergensen, H a

a AIXTRON AG (Germany)

Author keywords

MOVPE; Planetary reactor ; Process monitoring; Reflectance anisotropy spectroscopy

Indexed keywords

ANISOTROPY; FILM GROWTH; METALLORGANIC VAPOR PHASE EPITAXY; MONOLAYERS; SEMICONDUCTOR QUANTUM WELLS; STOICHIOMETRY; SURFACE CHEMISTRY;

REFLECTANCE ANISOTROPY SPECTROSCOPY (RAS);

THIN FILMS;

EID: 0037156084 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(02)00101-3 Document Type: Conference Paper

Times cited : (2)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.