Point defects and stacking faults in TiSi2 phases by tight binding molecular dynamics

Journal of Physics Condensed Matter

Volumn 14, Issue 41, 2002, Pages 9535-9553

  Iannuzzi, M ^a   Raiteri, P ^b   Celino, M ^c   Miglio, L ^b  

^a Centro Svizzero Di Calcolo Scientifico   (Switzerland)

^b UNIVERSITY OF MILANO BICOCCA   (Italy)

^c ENEA C R CASACCIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL METHODS; FILM GROWTH; MOLECULAR DYNAMICS; STACKING FAULTS; SUBSTRATES; TITANIUM COMPOUNDS;

SOLID STATE REACTIONS;

POINT DEFECTS;

EID: 0037152442     PISSN: 09538984     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-8984/14/41/310     Document Type: Article

References (30)

1. Iannuzzi M., Celino M. and Miglio L. 2000 Phys. Rev. B 61 14 450.
2. Colgan E.G., Gambino J.P. and Hong Q.Z. 1996 Mater. Sci. Eng. R16 2.
3. Beyers R. and Sinclair R. 1985 J. Appl. Phys. 57 5240.
4. Dehm C., Gyulai J. and Ryssel H. 1992 Appl. Phys. Lett. 60 1214.
5. Beyers R., Coulman D. and Merchant P. 1987 J. Appl. Phys. 61 5110.
6. Nemanich R.J., Fulks R.T., Stafford B.L. and Vander Plas H.A. 1985 Appl. Phys. Lett. 46 670 Nemanich R.J., Fulks R.T., Stafford B.L. and Vander Plas H.A. 1985 J. Vac. Sci. Technol. A 3 938 Nemanich R.J., Doland C.M., Fulks R.T. and Ponce F.A. 1986 Mater. Res. Soc. Symp. Proc. 54 255.
7. Nemanich R.J., Fulks R.T., Stafford B.L. and Vander Plas H.A. 1985 Appl. Phys. Lett. 46 670 Nemanich R.J., Fulks R.T., Stafford B.L. and Vander Plas H.A. 1985 J. Vac. Sci. Technol. A 3 938 Nemanich R.J., Doland C.M., Fulks R.T. and Ponce F.A. 1986 Mater. Res. Soc. Symp. Proc. 54 255.
8. Nemanich R.J., Fulks R.T., Stafford B.L. and Vander Plas H.A. 1985 Appl. Phys. Lett. 46 670 Nemanich R.J., Fulks R.T., Stafford B.L. and Vander Plas H.A. 1985 J. Vac. Sci. Technol. A 3 938 Nemanich R.J., Doland C.M., Fulks R.T. and Ponce F.A. 1986 Mater. Res. Soc. Symp. Proc. 54 255.
9. Jeon H., Sukow C.A., Honeycutt J.W., Rozgonyi G.A. and Nemanich R.J. 1992 J. Appl. Phys. 71 4269.
10. Chou T.C., Wong C.Y. and Tu K.N. 1987 J. Appl. Phys. 62 2275.
11. Migas D.B., Iannuzzi M., Miglio L., La Via F. and Grimaldi M.G. 1999 Mater. Res. Soc. Symp. Proc. 580.
12. La Via F., Grimaldi M.G., Migas D.B. and Miglio L. 2001 Appl. Phys. Lett. 78 739.
13. Mattheiss L.F. 1989 Phys. Rev. B 39 7754.
14. Villars P. (ed) 1997 Pearson's Handbook of Crystallographic Data for Intermetallic Phases (Materials Park, Ohio: American Society for Metals).
15. Rosenkranz R. and Frommeyer G. 1992 Z. Metall. 83 9.
16. Lide D.R. (ed) 1997 Handbook of Chemistry and Physics 78th edn, ed C. Bernard (Boca Raton, FL: Chemical Rubber Company Press) Bernard C. (Institut National Polytechnique de Grenoble) private communication.
17. Lide D.R. (ed) 1997 Handbook of Chemistry and Physics 78th edn, ed C. Bernard (Boca Raton, FL: Chemical Rubber Company Press) Bernard C. (Institut National Polytechnique de Grenoble) private communication.
18. Chou M.Y. and Mercer J.L. 1993 Phys. Rev. B 47 9366 Koyama M. 1991 J. Phys.: Condens. Matter 3 2193 Kwon et al. 1994 Phys. Rev. B 49 7242 Lenosky T.J. et al. 1997 Phys. Rev. B 55 1528.
19. Chou M.Y. and Mercer J.L. 1993 Phys. Rev. B 47 9366 Koyama M. 1991 J. Phys.: Condens. Matter 3 2193 Kwon et al. 1994 Phys. Rev. B 49 7242 Lenosky T.J. et al. 1997 Phys. Rev. B 55 1528.
20. Chou M.Y. and Mercer J.L. 1993 Phys. Rev. B 47 9366 Koyama M. 1991 J. Phys.: Condens. Matter 3 2193 Kwon et al. 1994 Phys. Rev. B 49 7242 Lenosky T.J. et al. 1997 Phys. Rev. B 55 1528.
21. Chou M.Y. and Mercer J.L. 1993 Phys. Rev. B 47 9366 Koyama M. 1991 J. Phys.: Condens. Matter 3 2193 Kwon et al. 1994 Phys. Rev. B 49 7242 Lenosky T.J. et al. 1997 Phys. Rev. B 55 1528.
22. Gas P., Scilla G., Michel A., Le Goues F.K., Thomas O. and d'Heurle F.M. 1988 J. Appl. Phys. 63 5335.
23. Wang B.Y., Wang Y.X., Gu Q. and Wang T.M. 1997 Comput. Mater. Sci. 8 267.
24. Kummerle E.A., Badura K., Sepiol B., Mehrer H. and Schaefer H.E. 1995 Phys. Rev. B 52 R6947.
25. Iannuzzi M., Raiteri P., Celino M. and Miglio L. 2001 J. Comput. Mater Sci. 20 394.
26. Allen M.P. and Tildesley D.J. 1987 Computer Simulation of Liquids (Oxford: Clarendon).
27. Miglio L., Iannuzzi M., Raiteri P. and Celino M. 2001 Microelectron. Eng. 55 83.
28. 2 over the C54 phase by thermodynamic analysis via tight binding molecular dynamics PhD Thesis University of Milano-Bicocca.
29. Ma Z. and Allen L.H. 1995 J. Appl. Phys. 71 4384.
30. Antonelli A., Justo J.F. and Fazzio A. 1999 Phys. Rev. B 60 4711.