Silicon diffusion in competitive TiSi2 phases by molecular dynamics simulations

Microelectronic Engineering

Volumn 55, Issue 1-4, 2001, Pages 83-92

  Miglio, Leo ^a   Iannuzzi, Marcella ^a   Raiteri, Paolo ^a   Celino, Massimo ^b  

^a UNIVERSITY OF MILANO BICOCCA   (Italy)

^b ENEA C R CASACCIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; KINETIC THEORY; MOLECULAR DYNAMICS; MOLECULAR STRUCTURE; THERMAL DIFFUSION IN SOLIDS;

MOLECULAR DYNAMICS SIMULATION;

TITANIUM COMPOUNDS;

EID: 0034831818     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(00)00432-9     Document Type: Article

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