Study of the thermal stability of an organic polymer low-K material

International Journal of Modern Physics B

Volumn 16, Issue 28-29, 2002, Pages 4441-4444

  Dong, Lu ^a   Zhenxiang, Xing ^a  

^a INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

AROMATIC HYDROCARBON; CARBON DIOXIDE; COPPER; ORGANIC COMPOUND; POLYMER;

CONFERENCE PAPER; DECOMPOSITION; GAS; GAS CHROMATOGRAPHY; HIGH TEMPERATURE; INFRARED SPECTROSCOPY; MASS SPECTROMETRY; SPECIES; TECHNIQUE; THERMAL DESORPTION; THERMOGRAVIMETRY; THERMOSTABILITY;

EID: 0037146286     PISSN: 02179792     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (6)

1. Martin S. J., Godschalx J. P., Mills M. E., Shaffer II E. O. and Townsend P. H., Adv. Mater. 12(23) (2000) pp. 1769-1777.
2. Hendricks N. H., in Proc. 6th DUMIC Conference (2000) pp. 17-26.
3. Miller R. D., Volksen W., Hedrick J. L., Hawker C. J., Remenar J. F., Furuta P., Nguyen C. V., Yoon D., Toney M., Rice D. P. and Hay J., in Proc. ULSI XV Conference (2000) pp.327-333
4. Labelle C. B. and Gleason K. K., J. Electrochem. Soc. 147(2) (2000) pp.678-681
5. Liu P. T., Chang T. C., Sze S. M., Pan F. M., Mei Y. J., Wu W. F., Tsai M. S., Dai B. T., Chang C. Y., Shih F. Y. and Huang H. D., Thin Solid Films 332 (1998) pp.345-350
6. Rajagopal A., Gregoire C., Lemaire J. J., Pireaux J. J., Baklanov M. R., Vanhaelemeersch S., Maex K. and Waeterloos J. J., J. Vac. Sci. Technol. B17(5) (1999) pp.2336-2340