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Volumn 16, Issue 28-29, 2002, Pages 4339-4342
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Characterization of cubic boron nitride thin films deposited by RF sputter
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Author keywords
[No Author keywords available]
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Indexed keywords
ARGON;
BORON DERIVATIVE;
BORON NITRIDE;
NITROGEN;
UNCLASSIFIED DRUG;
ATOMIC FORCE MICROSCOPY;
CONFERENCE PAPER;
FILM;
INFRARED SPECTROSCOPY;
RADIOFREQUENCY;
X RAY PHOTOELECTRON SPECTROSCOPY;
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EID: 0037146232
PISSN: 02179792
EISSN: None
Source Type: Journal
DOI: 10.1142/s021797920201539x Document Type: Conference Paper |
Times cited : (4)
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References (14)
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