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Volumn 16, Issue 28-29, 2002, Pages 4339-4342

Characterization of cubic boron nitride thin films deposited by RF sputter

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; BORON DERIVATIVE; BORON NITRIDE; NITROGEN; UNCLASSIFIED DRUG;

EID: 0037146232     PISSN: 02179792     EISSN: None     Source Type: Journal    
DOI: 10.1142/s021797920201539x     Document Type: Conference Paper
Times cited : (4)

References (14)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.