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Volumn 504, Issue , 2002, Pages 108-114
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Hydrogen desorption kinetics and Ge2H6 reactive sticking probabilities on Ge-adsorbed Si(0 1 1)
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Author keywords
Auger electron spectroscopy; Models of surface kinetics; Silicon; Surface chemical reaction; Thermal desorption spectroscopy
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Indexed keywords
ADSORPTION;
AUGER ELECTRON SPECTROSCOPY;
BINDING ENERGY;
DESORPTION;
EPITAXIAL GROWTH;
GERMANIUM COMPOUNDS;
HYDRIDES;
HYDROGEN;
REACTION KINETICS;
REFLECTION HIGH ENERGY ELECTRON DIFFRACTION;
SURFACE STRUCTURE;
THERMAL EFFECTS;
DESORPTION KINETICS;
SILICON;
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EID: 0037140018
PISSN: 00396028
EISSN: None
Source Type: Journal
DOI: 10.1016/S0039-6028(01)01922-7 Document Type: Article |
Times cited : (6)
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References (22)
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