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Volumn 16, Issue 1-2, 2002, Pages 197-204
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The effects of HF/PdC12 activation on electroless copper film properties
a
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Author keywords
[No Author keywords available]
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Indexed keywords
CHLORIDE;
COPPER;
HYDROFLUORIC ACID;
NITROGEN;
PALLADIUM;
TITANIUM;
CATALYSIS;
CONFERENCE PAPER;
CONFORMATION;
ELECTROPLATING INDUSTRY;
FILM;
METAL BINDING;
PROCESS DESIGN;
PROCESS DEVELOPMENT;
SURFACE PROPERTY;
SURFACE TENSION;
TECHNOLOGY;
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EID: 0037138089
PISSN: 02179792
EISSN: None
Source Type: Journal
DOI: None Document Type: Conference Paper |
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Times cited : (10)
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References (8)
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