Fabrication of an array of surface mount device 32.768 kHz quartz tuning fork-type crystals: Photolithography and selective etching of an array of quartz tuning fork resonators with subsequent photoresist spray coating

Vacuum

Volumn 65, Issue 2, 2002, Pages 161-168

  Lee, Sungkyu ^a  

^a Ajou University   (South Korea)

Author keywords

Etching; Photolithography; Photoresist spray coating method; Quartz; Series resistance measurement; Surface mount device; Tuning fork

Indexed keywords

ETCHING; FINITE ELEMENT METHOD; PHOTOLITHOGRAPHY; PHOTORESISTS; QUARTZ; SPRAYED COATINGS; SURFACE PHENOMENA;

TUNING-FORK-TYPE QUARTZ CRYSTALS;

SURFACE MOUNT TECHNOLOGY;

EID: 0037134168     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(01)00477-8     Document Type: Article

References (10)

1. Anisotropy-independent through micromachining of quartz resonators by ion track etching
2. Photolithography and selective etching of an array of surface mount device 32.768 kHz quartz tuning fork resonators: Definition of side-wall electrodes and interconnections using stencil mask
3. Photolithography and selective etching of an array of quartz tuning fork resonators with improved impact resistance characteristics
4. X-cut miniature tuning forks realized by ion track lithography