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Volumn 40, Issue 9 A, 2001, Pages 5480-5484
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Photolithography and selective etching of an array of surface mount device 32.768 kHz quartz tuning fork resonators: Definition of side-wall electrodes and interconnections using stencil mask
a
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Author keywords
Oblique evaporation; Photolithography; Quartz; Side wall electrode; Tuning fork
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Indexed keywords
ELECTRIC PROPERTIES;
ELECTRODES;
ETCHING;
EVAPORATION;
MASKS;
OPTICAL INTERCONNECTS;
PHOTOLITHOGRAPHY;
QUARTZ;
SURFACE MOUNT TECHNOLOGY;
CRYSTAL IMPEDANCE;
OBLIQUE EVAPORATION;
SIDE WALL ELECTRODE;
STENCIL MASK;
SURFACE MOUNT DEVICE;
TUNING FORK;
OPTICAL RESONATORS;
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EID: 0035456745
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.40.5480 Document Type: Article |
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Times cited : (12)
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References (9)
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