Photolithography and selective etching of an array of quartz tuning fork resonators with improved impact resistance characteristics

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 40, Issue 8, 2001, Pages 5164-5167

  Lee, S ^a  

^a Ajou University   (South Korea)

Author keywords

Etching; Photolithography; Quartz; Tuning fork; Wafer

Indexed keywords

CODE DIVISION MULTIPLE ACCESS; ETCHING; FINITE ELEMENT METHOD; GLOBAL SYSTEM FOR MOBILE COMMUNICATIONS; PERSONAL COMMUNICATION SYSTEMS; PHOTORESISTS;

TUNING FORK RESONATORS;

OPTICAL RESONATORS;

EID: 0035415082     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.40.5164     Document Type: Article

References (10)