X-cut miniature tuning forks realized by ion track lithography

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 47, Issue 1, 2000, Pages 8-15

  Thornell, Greger ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; ION BEAM LITHOGRAPHY; QUARTZ; SINGLE CRYSTALS;

ION TRACK LITHOGRAPHY; TUNING FORKS;

CRYSTAL RESONATORS;

EID: 0033875462     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.818744     Document Type: Article

References (11)

1. [I] G. Thornell, K. Hjort, B. Studer, and J.-A. Schweitz. "Cutindependent deep structuring of quartz for frequency control applications,'' in Proc. IEEE Int. Freq. Contr. Symp., Honolulu, HI, 1996, pp. 615-622.
2. G. Thornell, H. Bengtsson. R. Spohr, E. J. van Veldhuizen, L. Westerberg, J.-A. Schweitz, B. Studer, and K. Hjort, Deep micromachining of insulating materials by etching of laterally con. strained-distributions of ion tracks,'1 in Proc. IEEE Workshop on Micro Electro Mechanical Systems, Heidelberg. Germany, 1998, pp. 211-217.
3. K. Hjort, G. Thornell, R. Spohr. and J.-A. Schweitz, Quartz micromachining by lithographic control of ion track etching," Appl. Phys. Lett., vol. 69, no. 22, pp.' 3435-3436, 1996.
4. B. Studer and W. Zingg, ' "Technology and characteristics of chemically milled miniature quartz crystals" in European Frequency and Time Forum, Neuchâtel, Prance, 1990.
5. E. W. Becker, W. Ehrfeld, P. Hagmann, A. Maner, and D. Münchmeyer, Fabrication of microstructures .with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanofprfning, and plastic moulding (LIGA process)," in Microelectronic Eng., vol 4, pp. 35-56, 1986.
6. D. Salt, Hy-Q Handbook of .Quartz Crystal Devices. United Kingdom: Van Nostrand Reinhold Co. Ltd., 1987.
7. J. Söderkvist and K. Hjort, Flexural vibrations in piezoelectric scnÜTinsulating GaAs," Sens. ActuatorsA, vol. 39, pp. 133-139, 1993.
8. J. C- Brice, Crystals for quartz resonators," Rev. Mod. Phys., vol. 57, no. 1, pp. 105-146, 1985. .
9. V. E. Bottom, Introduction to Quartz Crystal Unit Design. New York: Van Nostrand Reinhold, 1982.
10. J. Tichy and G. Gautschi, Piezoelektrische Meβtechnik. Heidelberg, German3': Springer-Verlag, 1980.
11. J. H. Staudte, Subminiature quartz tuning fork resonator," in Proc. IEEE Int. Freq. Contr. Symp., Washington, 1973, pp. 5054.