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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 2, 2001, Pages 447-454

Study of surface chemical changes and erosion rates for CV-1144-O silicone under electron cyclotron resonance oxygen plasma exposure

(4) Yan, L a Gao, X a Bungay, C a Woollam, J A a

a UNIVERSITY OF NEBRASKA LINCOLN (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON CYCLOTRON RESONANCE; ELLIPSOMETRY; EROSION; IRRADIATION; LIGHT ABSORPTION; OXYGEN; PLASMA APPLICATIONS; REFRACTIVE INDEX; SILICONES; ULTRAVIOLET SPECTROSCOPY;

SPECTROSCOPIC ELLIPSOMETRY;

PLASTIC FILMS;

EID: 0035273634 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1340652 Document Type: Article

Times cited : (19)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.