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Volumn 41, Issue 9 A/B, 2002, Pages

Working pressure effects on deposition of large-area microcrystalline silicon films on flexible plastic substrate at 130°C

Author keywords

Flexible plastic substrate; Large area; Microcrystalline silicon; Plasma chemical vapor deposition; Solar cell; Working pressure

Indexed keywords

CRYSTALLIZATION; DEPOSITION; PRESSURE EFFECTS; SOLAR CELLS; SUBSTRATES; THERMAL EFFECTS;

MICROCRYSTALLINE SILICON;

AMORPHOUS SILICON;

EID: 0037107110 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.41.l978 Document Type: Article

Times cited : (7)

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